10月のDSCトークはソニーグループ株式会社 R&Dセンター&コーポレートテクノロジー戦略部門 主幹研究員
(兼) 東京工業大学 地球インクルーシブセンシング機構 特任教授の冨谷 茂隆先生にご講演いただきました。
Prof. Shigetaka Tomiya
Corporate Distinguished Researcher, R&D Center/Corporate Strategy Div.
Sony Group Corporation
(Concurrent) Research Institute for Earth Inclusive Sensing, Tokyo Institute of Technology
TITLE: The Role of Measurement Informatics in Semiconductor Materials and Devices R&D
In recent years, the materials and devices R＆D has become increasingly advanced and complicated, and materials informatics (MI) is becoming more and more widespread. Most of the current MI research is mainly focused on finding new materials by using simulation data. This is because simulation data is noise-free and provides a relatively large amount of data. However, in order to verify the results, it is essential to compare them with experimental results, and for this purpose, the utilization of measurement data is indispensable. In addition, in order to tailor a material into a device, manufacture and commercialize it, it is essential to develop the corresponding process and improve the yield rate at the manufacturing stage. Needless to say, the acquisition and utilization of measurement data is essential in this process. In this seminar, I will show our efforts such as analysis of ion processing damage in nitride semiconductors by electron beam loss spectroscopy, and describe the utilization of informatics in the measurement field in semiconductor materials and devices and their future prospects.