DSC internal talk in November
Prof. Shigetaka Tomiya gave a lecture in November.
The details are as follows.
Prof. Shigetaka Tomiya (Metrology Informatics Laboratory)
STEM-3DAP Correlative Analysis of Gallium Nitride Semiconductor Material
~Towards nanoscale 3D multimodal metrology techniques~
To conduct research and develop evolving materials and devices efficiently, it is essential to fully utilize and exploit measurement technology (material analysis technology) more than ever. For this purpose, it is important to integrate multiple methods organically. We will present a case study of a Gallium Nitride semiconductor that combines typical nano-analysis techniques, scanning transmission electron microscopy (STEM), and a 3D atom probe. Furthermore, based on this case, future efforts to construct a 3D multi-modal analysis method will be discussed.